JPH03115846U - - Google Patents
Info
- Publication number
- JPH03115846U JPH03115846U JP2578390U JP2578390U JPH03115846U JP H03115846 U JPH03115846 U JP H03115846U JP 2578390 U JP2578390 U JP 2578390U JP 2578390 U JP2578390 U JP 2578390U JP H03115846 U JPH03115846 U JP H03115846U
- Authority
- JP
- Japan
- Prior art keywords
- manipulator
- vacuum chamber
- arm
- cryostat
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2578390U JPH03115846U (en]) | 1990-03-14 | 1990-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2578390U JPH03115846U (en]) | 1990-03-14 | 1990-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03115846U true JPH03115846U (en]) | 1991-12-02 |
Family
ID=31528704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2578390U Pending JPH03115846U (en]) | 1990-03-14 | 1990-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03115846U (en]) |
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1990
- 1990-03-14 JP JP2578390U patent/JPH03115846U/ja active Pending